Microsystems and nanomaterials (MINAMAT)

Presentation

MINAMAT brings together three teams working on the following topics:

• Surface nanostructuration of III-V and III-N semiconductors and surface analysis by electronic spectroscopies (AES, XPS, UPS, EPES, EELS) (Surface and Interface).
• 3VAH: Hydride Vapor Phase Epitaxy (HVPE) of III-V and III-N semiconductors - Nanowires, nanogratings (3VAH: HVPE epitaxy).
• Development of Chemical Sensor MicroSystems for the selective metrology of weakly concentrated species such as air/atmospheric or indoor pollutants (Systems and Microsystems for Chemical Sensors).

Head